扫描近场光学显微镜中探针样品间距控制方法  

Tip-Sample Distance Regulations in Scanning Near-Field Optical Microscopy

作　　者：王昭[1] 吴世法[1] 

机构地区：[1]大连理工大学近场光学与纳米技术研究所,辽宁大连116024

出　　处：《微纳电子技术》2008年第11期662-667,共6页Micronanoelectronic Technology

摘　　要：在动态原子力与近场光学扫描显微镜中,探针与样品的间距关系到分辨率以及扫描速度这两个最重要参数的性能。在对几种主要的动态原子力/扫描近场光学组合显微镜的探针/样品间距控制模式分析的基础上,认为提高探针Q值是提高扫描显微镜分辨率的有效方法。但是,对采用检测控制探针振幅模式,期望在提高分辨率的同时加快扫描成像速度是不可实现的,因而限制了其发展的空间。而在检测控制探针频率模式下,提高探针Q值,可有效提高扫描探针显微镜的分辨率,且不会制约扫描成像速度的提高。该结论为将来的纳米操作和纳米超高密度光存储的实用化提供了可能,对大连理工大学近场光学与纳米技术研究所研制的原子力与光子扫描隧道组合显微镜(AF/PSTM)的改进和产业化具有积极意义。A tip-sample distance regulation is one of key problems in dynamic atomic force/ scanning near-field optical microscopy, which affects the two important parameters, the resolution and scanning velocity. Several methods for measuring and controlling tip-sample distance in dynamic atomic force/scanning near-field optical microscopy are reviewed, the conclu- sion can be obtained that increasing the Q value of tip can improve the resolution effectively. On this premise, the mode that measures and controls the oscillation amplitude of the tip can not get high resolution with improving scanning speed at the same time, which limits its development. The mode for measuring and controlling the oscillation frequency of the tip effectively improves the resolution, but does not effect scanning speed, which will provide a possibility for future nano-operation and nano-ultra-high density optical storage. It also allows Institute of Near-Field and Nano Technology in Dalian University of Technology to enhance the scanning speed of AF/ PSTM for the future industrialization.

关 键 词：动态原子力显微镜 近场扫描光学显微镜 间距控制 控制模式 扫描速度 分辨率 

分 类 号：TH742[机械工程—光学工程]