轴对称非球面透镜光轴共轴度的测量研究  

Coaxial measurement of axisymmetric aspheric lens

作　　者：陈钦芳[1] 徐昌杰[1] 

机构地区：[1]西安工业大学陕西省薄膜技术与光学检测重点实验室,陕西西安710032

出　　处：《应用光学》2008年第6期870-873,共4页Journal of Applied Optics

基　　金：陕西省薄膜技术与光学检测重点实验室开放基金项目(605-01000105)

摘　　要：介绍了一种轴对称非球面透镜的光轴共轴度的测量方法。激光管发出的光束经束腰变换透镜入射到被测透镜的非球面表面,由CCD摄像头接收非球面的反射激光光斑,CCD的光敏面位于反射激光光束的束腰位置;调整被测透镜位置,直到激光束腰中心位置不随被测非球面透镜的旋转而变化,这说明被测透镜的非球面对称轴与机械旋转轴重合;再利用球面偏心测量原理检测被测透镜球面一面的偏心量,即可以求得被测非球面透镜的光轴共轴度。该测量方法的误差小于20″。该方法适用于判定非球面透镜和非球面反射镜是否合格,以及调整非球面透镜的制造工艺。A method to measure coaxiality of axisymmetric aspheric lens is introduced. A laser beam is incident on the aspheric side of a tested lens through a beam waist conversion lens and the beam reflected by the aspheric surface is received by CCD camera, The position of the aspheric lens is adjusted until the center of the beam waist doesn＇t move with the rotation of the tested aspheric lens. It shows that the symmetry axis of the aspheric surface is aligned with the rotation axis. Then the eccentricity of the sphere side of the tested lens is measured according to the principle of the spherical eccentric measurement. The accuracy of the measurement is better than 20″. This method is applicable to the acceptance inspection of aspheric lens and aspheric mirrors, as well as the improvement of aspheric lens process.

关 键 词：非球面检测 非球面透镜 共轴度 

分 类 号：TN205-32[电子电信—物理电子学]