针式轮廓仪的技术改进研究  

Research on Technique Improvement of the Stylus Profiler

作　　者：罗宽[1] 田明[1] 臧景峰[1] 冯进良[1] 

机构地区：[1]长春理工大学光电工程学院,长春130022

出　　处：《长春理工大学学报（自然科学版）》2008年第4期81-83,共3页Journal of Changchun University of Science and Technology(Natural Science Edition)

基　　金：31基地资助项目

摘　　要：随着精密和超精加工技术的进步,需要更高水平的设备检测微表面质量。表面粗糙度是一个重要指标,表面粗糙度测量仪从二维到三维实施检测。虽然许多非接触检测技术已得到应用,不过要从安装方便、可靠性高这个角度来看,针式法是一种优先选用的方法。本文对如何引进和使用精密三维工作台来改善此方法进行了研究。详细论述了测量系统的组成和精密三维工作台的设计。通过三个设计方案的论证分析,提出了将针式测量仪和计算机结合在一起的智能化测量系统。该检测方法具有检测参数超过平面限制的三维粗糙度测量方法。With the development ofprecision and super-finish technology, we require higher detecting level device to detect the micro-surface quality. The surface roughness is one of important index. The measuring instrument detects surface roughness from planar detecting to three-dimension detecting. Although many non-contact detecting technologies have applied, if we consider it from fixing convenience and reliability, the stylus method is a common method. This article discuss this method and introduce how we improve it by using a FTDW （ Fine Three- Dimension Workbench ） . Elaborated the com- position of the measuring system and the design of the FTDW in detail. The design uses a microcomputer measuring system in which we combine a common stylus profilograph and microcomputer together. The method has the method of detecting the three-dimension roughness whose detection parameters over the limitation of the planar.

关 键 词：表面粗糙度 精密工作台 步进电机 滚珠丝杠 表面轮廓参数 

分 类 号：TH122[机械工程—机械设计及理论]