离散点的线轮廓度评价算法  

Evaluation algorithm of curve profile based on discrete points

作　　者：张进[1] 王仲[1] 李超[1] 贡力[1] 叶声华[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《光学精密工程》2008年第11期2281-2285,共5页Optics and Precision Engineering

基　　金：天津市自然科学基金资助项目(No.043612111)

摘　　要：为了实现微型零件轮廓的高精度测量,根据其成像特点,提出了一种基于离散点的轮廓度评价算法——被测轮廓与理论轮廓离散点间最小距离法。首先,提取出被测轮廓的边缘点信息,然后,依据理论轮廓计算出一系列间距极小的坐标点并建立坐标系,将被测轮廓点与理论轮廓点对应,最后将计算得出的每个被测轮廓点到最近理论轮廓点的距离作为该点的轮廓度误差。实验结果证明,测量精度优于2 pixel,此方法可有效地提高线轮廓度的评价精度和效率。For achieving high precision measurement of linear profile for micro-parts, an evaluation al- gorithm of linear profile based on discrete points is proposed according to the imaging characteristics. Firstly,an edge detector is used to obtain the edge of the micro-parts. Then, a series of points with tiny interval can be calculated by the expressions of designed profile and a system coordinate is build for corresponding the points of actual profile and the points of designed profile. Finally, the minimum dis- tance between every point of actual profile and the point of designed profile is taken as the linear pro- file error of the point. The experimental results show that the error is less than 2 pixel, so the proposed algorithm can significantly improve the precision and efficiency in the measurement of linear profile.

关 键 词：线轮廓度误差 微型零件 最小距离法 离散点 

分 类 号：TP391.4[自动化与计算机技术—计算机应用技术]