磁控溅射Cr/C镀层耐热性能研究  

Study on Heat-resistance of Magnetron Sputtered Cr/C Coating

作　　者：严少平[1,2] 蒋百灵[1] 苏阳[1] 白力静[1] 龙艳妮[1] 

机构地区：[1]西安理工大学材料科学与工程学院,西安710048 [2]安徽理工大学理学院,安徽淮南232001

出　　处：《材料工程》2008年第11期36-40,共5页Journal of Materials Engineering

基　　金：国家“863”科技攻关项目(2005AA33H010);西安理工大学创新基金(101-210603)

摘　　要：在空气炉加热环境下于不同温度对采用磁控溅射离子镀技术制备Cr/C镀层样品进行加热保温处理。研究了不同加热温度下镀层的相结构、硬度和结合力的变化,考察了Cr/C镀层的耐热性能。结果表明:在600℃以下,Cr/C镀层保持了高硬度和强结合力的性能,表明镀层具有良好的耐热性能;镀层受热过程中生成了致密的铬氧化物及铬碳化合物,起到阻碍了氧原子向内层扩散的效果,使镀层氧化失稳的温度大大提高,从而保证了良好的耐热性能;处理温度达800℃后,镀层硬度和结合力明显下降。Magnetron sputtered Cr-C coatings were treated at different temperatures in the air furnace. The variation of phase structures, microhardness and adhesion of coatings at different temperatures were investigated in order to evaluate the thermal stability of Cr/C coating. The results indicated that. Cr-C coatings presented high microhardness, adhesion and good thermal stability below 600℃. The dense chromium oxide and carbide formed during the coating heated, which hindered the diffusion of oxygen atoms to the inner layers and elevated the destabilizing temperature highly, as a result, a fine heat-resistance presented. The microhardness and adhesion of coatings decreased notably after the processing temperature reached 800℃.

关 键 词：磁控溅射 Cr/C镀层 热处理 耐热性能 

分 类 号：TG174.32[金属学及工艺—金属表面处理] O484.5[金属学及工艺—金属学]