用于原子力与光子扫描隧道组合显微镜的浸油显微物镜  

An Immersion Microscope Objective Applied to AF/PSTM

作　　者：孙敬霞[1] 吴世法[1] 李银丽[1] 

机构地区：[1]大连理工大学物理与光电工程学院近场光学与纳米技术研究所,辽宁大连116024

出　　处：《光学与光电技术》2008年第6期64-67,共4页Optics & Optoelectronic Technology

摘　　要：双功能原子力与光子扫描隧道显微镜(AF/PSTM)用π对称双光束照明方法来消除假象。为改进现有的AF/PSTM系统,提出新的照明系统方案,并设计了新方案中需要的高数值孔径的浸油显微物镜。根据具体的物镜系统参数要求,选择合适的初始结构,用ZEMAX光学设计软件对物镜进行设计、优化和像质评价,设计结果显示浸油物镜的数值孔径大约1.54,可以很好地满足照明系统的需要。With the method of π symmetry two beams lighting, the AF/PSTM （atomic force/photon scanning tunneling mi croscope） can eliminate the optical spurious image. A new lighting scheme is proposed for improving the AF/PSTM system. A high numerical immersion microscope objective is designed to be applied to the new illumination system of AF/PSTM. The configuration of the objective is selected according to the application requirements and the aberration theory. The profes sional optical design software ZEMAX is used to optimize the design and estimate the image quality. The result of the design shows the NA is about 1.54. It meets the requirement of the illumination system well.

关 键 词：原子力与光子扫描隧道组合显微镜 显微镜 浸油 数值孔径 

分 类 号：TH742[机械工程—光学工程]