多弧离子镀膜机(буиат-6)性能分析和工艺参数研究  

INVESTIGATION OF буиат-6 MULTI-ARC PLASMA FILM PLATING MACHINE AND ITS TECHNICAL CHARATERISTICS

作　　者：谢光荣[1] 胡社军[1] 黎炳雄[1] 王桂棠[1] 黄小平 

机构地区：[1]广东工业大学材料科学与工程系

出　　处：《广东机械学院学报》1997年第2期14-20,共7页Industrial Engineering Journal

摘　　要：分析研究了多弧离子镀膜机буиат—６的主要性能。在不同工艺参数条件下，于高速钢基体上制备了Ｔｉ膜和ＴｉＮ膜，用扫描电镜观察Ｔｉ膜表面形貌；用能谱仪对Ｔｉ膜上小液滴颗粒成份进行测试分析；用超微负荷硬度计测量了ＴｉＮ膜的显微硬度；用表面刻划仪测试了ＴｉＮ膜与基体的附着力。实验结果表明：选择适当的工艺条件，包括弧流大小，电磁场强度，镀膜时间以及冷阴极离子源辅助沉积，可获得性能优良的ＴｉＮ膜，其显微硬度可达Ｈｖ２５００，附着力为６５Ｎ。Titanium and titanium nitride film were deposited on high speed steel with буиат-6 multi-arc plasma film plating machine under different parameters to investigation the main characteristics of the machine. The titanium film was analysised with Scanning electronic microscope and energy spectrometer.The microhardness of titanium nitride film was measured with microhardness tester,and the adhesion between the film and substrate was measured with surface scratch tester.The experiment results showed that excellent titanium nitride film with microhardness of Hv2500 and adhesion of 65N could be oblained in proper technical parameters inducding arc-point intening,electromagnetic field intensity,ptating temperature and time,ion beam enhanced deposition.

关 键 词：多弧离子镀膜机 性能分析 工艺参数 

分 类 号：TG174.4[金属学及工艺—金属表面处理]