光学元件表面污染物检测仪系统研究与开发  

Research and Design of Contamination Inspection System for Optical Surface

作　　者：蒋勇[1] 谢志江[1] 朱小龙[1] 

机构地区：[1]重庆大学机械工程学院,重庆400030

出　　处：《机械与电子》2008年第12期11-14,共4页Machinery & Electronics

摘　　要：针对光学元件表面污染物,设计了污染物检测仪系统.阐述了系统硬件和软件的构成,简单介绍了污染物图像的处理,分析了相机在扫描过程中的运动控制,以及高精度的运动控制的实现.最后提出了污染物与疵病区分的理论与方法.For the contamination of optical surface,the inspection system was designed. It presents the constitution of hardware and software of the system and introduces the image processing for contamination in this paper. After the working process of line scan cameras, the analysis of controlling- movement was done and high precision for movement controlling was achieved. Finally, the theory and method for distinguishing between contamination and flaws was presented.

关 键 词：检测仪 污染物 线扫描相机 三维电控平移台 疵病 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]