离子束辅助蒸发对ZnS,MgF_2及Al膜层性能的影响  

How Ion-beam Assisted Evaporation Influenced Film Properties of ZnS, MgF_2 and Al

作　　者：王红萍[1] 闫席珍 

机构地区：[1]太原光学仪器厂,山西太原030012

出　　处：《太原科技》2008年第12期92-93,共2页Taiyuan Science and Technology

摘　　要：通过实验数据证明了离子束辅助蒸发对ZnS,MgF2及Al膜层折射率、牢固度及环境耐受性的影响,并简要分析了产生这些影响的原因。The experimental data proved how assisted evaporation of ion beam influenced refractive index, durability and environmental tolerance degree of ZnS, MgF2 and Al. Also in this paper, we analyzed the causation of these effects.

关 键 词：离子束辅助 膜层 光学薄膜材料 

分 类 号：O484.4[理学—固体物理]