采用双晶片驱动的棒板结合式压电驱动器设计(英文)  

Disk-pivot structure micro piezoelectric actuator with bimorph

作　　者：褚祥诚[1] 陈翔宇[1] 李龙土[1] 

机构地区：[1]清华大学材料科学与工程系新型陶瓷与精细工艺国家重点实验室,北京100084

出　　处：《光学精密工程》2008年第12期2366-2370,共5页Optics and Precision Engineering

基　　金：Supported by the NSAF(No.10676015);the NSFC(No.50621201);the National 863 High Tech-nology Research and Development Program of China(No.2007AA03Z107)

摘　　要：设计制作了一种采用双晶片压电陶瓷结构的棒板结合式压电驱动器。和参考文献中的驱动器不同,其两个压电陶瓷片分别粘接在青铜定子的上下两侧。定子上的金属圆柱体被用来放大振动的横向位移,并对金属棒状的转子进行激振,使其旋转。利用有限元分析(FEA)对定子进行了分析,发现在同样的驱动模式下,与传统的单片陶瓷片驱动器相比,该驱动器可以提供更多的横向和纵向的振动位移,大约提高25%左右。这种新结构也可避免不同振动模式之间的模态耦合现象,并产生理想的振动模态,以提高驱动器的运行稳定性。实验表明,驱动器在25Vo-p低电压下可以提供512r/min的转速,而单片陶瓷驱动器在该电压下不能工作。这种压电驱动器可以经过优化和调整来满足不同的实际应用,如精确定位仪器,生物工程和光聚焦系统等。A disk-pivot structure micro piezoelectric actuator with bimorph is designed. Different from the piezoelectric actuators described in reference papers, two piezoelectric discs in the actuator are bonded on the both sides of the bronze stator. The metal cylinder on the stator is used to amplify the transverse displacement and to actuate the metal rod rotor to rotate. The stator is analysed using Finite Element Analysis （FEA）, the results show that the actuator can provide more transverse and vertical displacements than the previous prototype with only one ceramic disc under the same driving and boundary conditions,the improvements can be nearly 25 %. This new structure can also avoid the coupling phenomena between different vibration modes and generate identical modal shape to enhance the stability of the actuator. Experiments illustrate that under the driving voltage 25 Vo-p, the actuator with only one ceramic disc can not run and the actuator with bimorph structure still has a speed of 512 r/min. Such piezoelectric actuator can be optimized and adjusted to satisfy different practical applications, such as precise positioning instrument, bioengineering and optical focus system, etc..

关 键 词：压电驱动器 振动模态 棒板结合 有限元法 

分 类 号：TM384[电气工程—电机]