Z轴硅微机械陀螺仪温度特性研究  

Research on Thermal Characteristic of Z-Input Silicon Micromachined Gyroscope

作　　者：陈淑铃[1] 杨波[1] 王寿荣[1] 

机构地区：[1]东南大学仪器科学与工程学院,南京210096

出　　处：《电子器件》2008年第6期1753-1756,共4页Chinese Journal of Electron Devices

基　　金：总装备部"十一五"预研课题资助项目(6922002055)

摘　　要：硅陀螺仪是近年来发展起来的一种新型角速度传感器,温度变化是其主要误差源之一。分析了温度变化对硅微陀螺仪的谐振频率和品质因数的影响,并选择常温下机械品质因数不同的两个陀螺在-40℃~80℃温度范围内进行测试,得出机械品质因数和谐振频率随温度变化规律。实验结果验证了陀螺仪谐振频率随温度升高而线形下降;温度变化时,封装陀螺仪抽真空度对陀螺机械品质因数产生明显影响。Silicon micromachined gyroscope is a kind of angular-rate-sensor developed in recent years, which has smaller size, lighter weight and lower cost than traditional rate-sensors. Temperature variation is one of the main errors for SMG. The thermal characteristic of SMG was analyzed,two gyroscopes of different Q-value were chosen and tested while the temperature ranged from --40 ℃to 80℃. The influence on the features of SMG owning to temperature change is construed. The experiment result shows that the resonant frequency of the gyroscope decreases linearly along with the temperature increment; the vacuum degree of the hermetic gyroscope imposes distinct influence on the mechanical factor of the gyroscope when temperature varies.

关 键 词：微机械陀螺仪 温度特性 

分 类 号：V241.59[航空宇航科学与技术—飞行器设计]