用于减小控制对测量影响的AFM新工作模式  

AFM's Operation Mode for Reducing the Control Influence on the Measurement

作　　者：王岳宇[1] 赵学增[1] 褚巍[1] 

机构地区：[1]哈尔滨工业大学机械电子工程学院,哈尔滨150001

出　　处：《纳米技术与精密工程》2008年第6期442-449,共8页Nanotechnology and Precision Engineering

基　　金：中国留学生基金委员会;美国国家标准与技术研究院(NIST)资助项目.

摘　　要：原子力显微镜(atomic force microscope,AFM)是纳米尺度线宽成像和测量的重要工具.但系统的非线性和控制器参数选择的多样性导致AFM控制的不确定性,影响了AFM测量结果的精确性和重复性.为克服这个缺点,分析了AFM的测量原理和工作模式的特点,在此基础上提出了一种新的工作模式——补偿模式.在这种工作模式中,结合了扫描器和悬臂梁的位置信息而得到被测试样表面的形貌图像.与恒力接触模式相比,在补偿模式下,AFM能够在高速度下以更好的精确性和重复性进行成像和测量.仿真和实验结果证明了这种新工作模式的可行性和适用性.实验结果说明该工作模式可以提高扫描速度16倍或减小均方根误差到约1/5.Atomic force microscope （ AFM ） is an important tool for imaging and measuring the nano-scale linewidth. However, the nonlinearity of AFM system and the diversity of the controller parameters result in uncertain of AFM＇s control, which finally influences the accuracy and repeatability of the AFM measuring results. To overcome this shortcoming, a new operation mode--compensating mode was presented, based on the analysis of AFM measuring principle and operation mode. Using this mode, the image of surface profile was acquired by combining the position information of controller and cantilever. Compared with the constant height mode, in the compensating mode, AFM can image and measure with preferable accuracy and repeatability in high speed. Simulation and experiment results show the feasibility and applicability of the new operation mode. And experiment results demonstrate that this operation mode can increase speed 16 times and reduce root mean square error to about 1/5.

关 键 词：原子力显微镜 补偿模式 扫描器 悬臂梁 

分 类 号：TH742[机械工程—光学工程]