非晶硅薄膜太阳能电池生产简述  

Production of Amorphous Sili

作　　者：卢志安[1] 迟晓红[1] 赵国华[1] 

机构地区：[1]秦皇岛玻璃工业研究设计院,秦皇岛市066001

出　　处：《玻璃》2008年第12期49-51,共3页Glass

摘　　要：简述了非晶硅薄膜太阳能电池基本原理,论述了采用等离子增强化学气相沉积(PECVD)技术生产非晶硅薄膜太阳能电池的工艺、产品性能参数及研究发展方向。The fundamental principle of amorphous silicon thin film solar cell was briefly introduced and the process of amorphous silicon thin film solar cell by plasma enhancement chemical vapour deposition was described. The performance parameters and research and davelopment direction of this product were also pointed out.

关 键 词：非晶硅薄膜太阳能电池 PECVD a—Si 

分 类 号：TQ171[化学工程—玻璃工业]