液流悬浮超光滑加工硬脆材料去除机理  

Removal Mechanism of Hydrodynamic Suspension Ultra-smooth Machining for Hard-brittle Materials

作　　者：曹志强[1] 詹建明[2] 张富[3] 

机构地区：[1]北京七星华创电子股份有限公司 [2]宁波大学工学院 [3]吉林大学机械科学与工程学院

出　　处：《农业机械学报》2008年第11期164-168,共5页Transactions of the Chinese Society for Agricultural Machinery

基　　金：国家自然科学基金资助项目(项目编号:50705044)

摘　　要：结合动态压痕断裂力学和粒子冲击磨损理论,建立了纳米磨粒冲击工件表面微观粗糙峰的理论模型,研究了加工区内材料的去除机理,并进行了铝合金和K9玻璃液流悬浮加工实验。理论分析和实验结果表明,液流悬浮超光滑加工是加工液中的纳米磨粒冲击工件表面实现对表面粗糙峰微去除的过程,能够在K9玻璃表面获得无加工变质层和亚表面损伤的纳米级超光滑表面。The dynamic indentation fracture mechanics and particles impacting erosion theory were applied to the research of hydrodynamic suspension ultra-smooth machining. The theoretic model of nanoscale abrasive particles impacting workpiece surface micro asperities was established. Subsequently, the experiments of machining for aluminum alloy and K9 glass were carried out respectively. The results show that the hydrodynamic suspension machining is the process of nanoscale impacting the surface asperities to realize the micro removal, and the nanaoscale ultra-smooth surface Without damage can be obtained during hydrodynamic suspension machining for K9 glass.

关 键 词：硬脆材料 超光滑表面 液流悬浮 加工机理 微去除 

分 类 号：TG669[金属学及工艺—金属切削加工及机床]