高纯六氟化钨的纯化工艺研究  

Purification Technics of High Purity Tungsten Hexafluoride

作　　者：柳彤[1] 王少波[1] 纪振红[1] 王占卫[1] 

机构地区：[1]中国船舶重工集团公司第七一八研究所

出　　处：《舰船防化》2008年第6期16-20,共5页

摘　　要：六氟化钨（WF6）在电子工业中有着广阔的应用前景。采用吸附-精馏-鼓泡联用纯化系统对WF6进行纯化。通过吸附除去WF6中的氟化氢（HF）杂质；设计精馏塔进行精馏实验除去其他轻组分杂质，并同时进行鼓泡纯化。研究表明吸附法对于WF6中的HF有很好的去除效果，可将WF6中HF的含量降到1×10^-6以下;精馏-鼓泡联用能将气相杂质的含量降到1×10^-6以下，经此纯化操作可以得到纯度为99．999％的高纯WF6。将精馏一鼓泡应用于WF6的纯化有着分离效果好、经济性好的优点，适用于工业化的生产。Tungsten hexafluoride has a far-ranging potential application in electronic industry fields. For the purification of Tungsten hexafluoride, the combined use of adsorption-rectify-bubbling is a nice way. Through adsorption, we can get rid of the HF in the Tungsten hexafluoride. Other impurities can be separated by the rectify-bubbling process. Experiments indicated that adsorption is a nice way for wiping off HE The result of experimentations shows that the content of HF can be reduced to less than 1×10^-6 in WF6. Combined Rectify and bubbling, we can make the content of gaseous impurities in WF6 reduced to less than 1×10^-6. Finally, we can acquire 99.999% high-purity WF6 through this purification process. Rectify-bubbling can be applied to the purification of WF6, which will get nice separate effect and has low cost and can be applied to industrialized production.

关 键 词：六氟化钨 吸附 精馏 鼓泡 

分 类 号：TQ163.13[化学工程—高温制品工业]