新型大面积圆筒状等离子体源制备金刚石膜  

Diamond Films Deposition by Novel Large Area Cylinder-shaped Plasma Source

作　　者：张磊[1] 马志斌[1] 吴振辉[1] 吴利峰[1] 

机构地区：[1]武汉工程大学湖北省等离子体化学与新材料重点实验室,湖北武汉430073

出　　处：《硬质合金》2008年第4期223-226,共4页Cemented Carbides

基　　金：国家自然科学基金(10875093);湖北省高等学校优秀中青年科技创新团队计划项目(2004419)

摘　　要：针对圆筒状基底材料的几何特征,设计了与之匹配的新型大面积圆筒状等离子体源。使用该等离子体源以乙醇蒸汽和氢气为气源在石英玻璃管外表面沉积金刚石膜。采用扫描电子显微镜、Raman光谱及X射线衍射表征了金刚石膜的质量;设计腐蚀实验检验了金刚石膜的抗腐蚀效果。结果表明:(1)在反应气压为5.5kPa、V乙醇/V氢气=8%、石英玻璃管温度为500℃的条件下,得到的均匀致密的纳米金刚石膜能有效增强石英玻璃管的抗腐蚀性能;(2)针对基底的尺寸和外形特征设计与之匹配的等离子体源是均匀制备金刚石膜最可行的途径。A novel large area cylinder-shaped plasma source was designed for the tube substrate. Diamond films had been deposited on quartz tube with the gas mixture of ethanol steam and hydrogen by the plasma source. The quality of diamond films had been characterized by SEM, Raman spectroscopy and XRD. A corrosion experiment was designed to test the anti-corrosion effect of diamond films. The results showed that, 1）when the reaction pressure was 5.5 kPa, the volume percentage of ethanol and hydrogen was 8%, the reaction temperature was 500 ℃, uniform distributed and compact nanocrystaUine diamond films could be obtained, and it was able to enhance the anti-corrosion performance of quartz tube; 2） the plasma source that matched the size and shape features of substrate was the best way for the uniformly deposition of diamond films.

关 键 词：谐振腔 均匀化 石英玻璃管 金刚石膜 抗腐蚀 

分 类 号：TB383.2[一般工业技术—材料科学与工程]