Quadrature error and offset error suppression circuitry for silicon micro-gyroscope  

硅微陀螺仪正交误差和失调误差抑制线路(英文)

作　　者：杨波[1] 周百令[1] 王寿荣[1] 

机构地区：[1]东南大学仪器科学与工程学院,南京210096

出　　处：《Journal of Southeast University(English Edition)》2008年第4期487-491,共5页东南大学学报（英文版）

摘　　要：The reasons for inducing quadrature error and offset error are analyzed and the expressions of quadrature error and offset error are induced. The open-loop system analysis indicates that, in order to avoid the appearance of harmonic peaks, the frequency difference δf between drive mode and sense mode must be less than 1/（2Qy）. In order to eliminate the effects of the quadrature error and the offset error, as well as the inherent non- linearity in the capacitance-type sensors, a closed-loop feedback control circuit with quadrature correction is designed. The experimental results indicate that the quadrature error and offset error are corrected. By comparing with open-loop detection, the closed-loop feedback control circuit with quadrature correction decreases the non-linearity of the scale factor from 16. 02% to 0. 35 %, widens the maximum rate capability from ± 270 （°）/s to ± 370 （°）/s and increases the stability of zero bias from 155. 2 （°）/h to 60. 6 （°）/h.分析了正交误差和失调误差产生的原因,推导了正交误差和失调误差的表达式.开环系统分析表明,为了避免开环系统出现谐振峰,两模态(驱动模态与敏感模态)频差δf必须小于1/(2Qy).为了消除正交误差、失调误差及电容传感器自身非线性的影响,设计了一个可实现正交误差校正的闭环反馈电路.实验结果表明,正交误差和失调误差得到较好抑制.与开环检测相比,闭环反馈回路将标度因数非线性从16.02%减少到0.35%,将最大测量范围从±270(°) /s扩展到±370(°) /s,将零偏稳定性从155.2(°) /h提高到60.6(°) /h.

关 键 词：silicon micro-gyroscope （SMG） quadrature error offset error closed-loop feedback stability of zero bias 

分 类 号：U666.123[交通运输工程—船舶及航道工程]