椭圆柱Bridgman炉生长Hg_(1-x)Cd_xTe晶体时固/液界面形状的数值模拟  

Numerical Simulation of S L Interface Shape in Elliptically Cylindrical Bridgman Furnace for Hg 1 x Cd x Te Crystal Growth

作　　者：王培林[1,2] 白红[1,2] 杨晶琦 

机构地区：[1]哈尔滨工业大学航天电子与光电工程系 [2]哈尔滨工业大学数学系

出　　处：《Journal of Semiconductors》1998年第2期108-114,共7页半导体学报（英文版）

基　　金：国家自然科学基金

摘　　要：用三维数值模拟方法研究了椭圆柱Ｂｒｉｄｇｍａｎ炉生长Ｈｇ１－ｘＣｄｘＴｅ晶体时固／液界面附近的温度分布，考察了安瓿位置、安瓿与炉膛直径相对大小以及炉膛温度分布等对固／液界面的影响情况．结果表明，椭圆柱Ｂｒｉｄｇｍａｎ炉内的特殊温度场分布有可能提高晶片上横向组分均匀性．Abstract The temperature distribution near the S L interface of the elliptically cylindrical Bridgman furnace for Hg 1 x Cd x Te Crystal growth is studied by using three dimensional numerical analysis method.The effects of ampoule position,the diameter relative size of the ampoule compared with that of the furnace and the temperature distribution in the furnace on the S L interface have been investigated.The results have shown that the temperature field in the elliptically cylindrical furnace has a possibility to effectively increase the lateral uniformity of each composition in Hg 1 x Cd x Te crystal.

关 键 词：碲镉汞 红外探测器 数值模拟 

分 类 号：TN215.04[电子电信—物理电子学]