硅镜超声加工机进给压力的检测与控制系统  

System of detecting and controlling feed force for ultrasonic machine of machining silicon mirror

作　　者：张云电[1] 韩俊慧[1] 陈炎[1] 余芳[1] 

机构地区：[1]杭州电子科技大学机械工程学院,浙江杭州310018

出　　处：《机电工程》2009年第1期74-76,共3页Journal of Mechanical & Electrical Engineering

基　　金：浙江省自然科学重点基金资助项目(Z105528)

摘　　要：超声加工是硅镜加工的有效加工方法,但是硅镜在加工中易出现裂纹和破碎。研究表明,工具对硅镜表面施加的压力不稳定是其中的一个重要原因。为了控制工具对硅镜表面施加压力的稳定性,采用压力传感器对硅镜表面施加的压力进行实时检测,并反馈给控制元件,一旦所检测到的压力超过所设定的额定压力值,控制元件就向执行元件发出执行指令,从而达到控制工具的目的。试验表明,该压力检测与控制系统可以有效地保证对硅镜表面所施加压力的稳定性,从而减少了硅镜在加工过程中出现破裂的情况。Ultrasonic machining is an effective method in the process of machining silicon mirror. However, cracks would appear in the process. Research shows that the instability of pressure which imposed on the silicon mirror surface is one of important reasons. The pressure in the surface of the Sic mirror by sensor was detected, the signal to control component was delivered. Once, the detecting pressure exceeded the setting pressure, the control component delivered an executive directive to the implementation component. Thus, the implement could be controlled. And, the experiment shows that this system with detection and control of force is effective and will reduce cracks in machining Sic mirror.

关 键 词：硅镜 压力检测与控制系统 超声加工 

分 类 号：TP271.4[自动化与计算机技术—检测技术与自动化装置]