微机械气流式水平姿态传感器的结构研究  

Study of micro-mechanical gas-flow level-gesture sensor's structure

作　　者：刘玉洁[1] 朴林华[1] 宋佳[1] 张福学[1] 

机构地区：[1]北京信息工程学院北京市传感器重点实验室,北京100101

出　　处：《传感器与微系统》2009年第1期59-61,共3页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(60772012);北京市教委面上计划基金资助项目(KM00710772009)

摘　　要：确定了微机械气流式水平姿态传感器2只热敏电阻器的最佳距离。采用有限元方法,利用AN-SYS-FLOTRAN CFD软件,计算了在不同倾斜状态下两热敏电阻器间距对敏感元件内流场分布的影响。计算结果表明:当两热敏电阻器的间距d改变时,温度场和流场都发生变化;在热敏电阻器加热功率一定的情况下,2只热敏电阻器处气流速度差Δv与倾角的关系曲线也随d发生变化。d=400μm时,线性范围最小,斜率最小;当d=300μm时,线性最好,斜率较大;d=200μm时,线性范围较窄,斜率最大。当d=400μm时,传感器线性范围最小,灵敏度最小;当d=300μm时,传感器的线性最好,灵敏度比较大;d=200μm时,线性范围较窄,灵敏度最大。综合比较,取d=300μm为最佳方案。The best distance of two thermistors is achieved. Using the finite element method and ANSYS- FLOTRAN CFD program. Effect of distance between two thermistors in different incline states on fluid field＇ s distributing of the sensing element is computed. The results are as follow ： the distance of two thermistors changes, both temperature-field and fluid-field will change too. The velocity difference △v of gas flow at both thermistors and tilt-angle relation curve will change with d, d =400 μm, linearity range is narrowest, and slope is narrowest ; d = 300 μm, linearity is best,and slope is larger;d =200 μm, linearity range is narrower,and slope is largest, d = 400 μm,sensor＇ s linearity range is narrowest, sensitivity is lowest; d =300 μm, sensor＇s linearity is best, sensitivity is higher;d =200 μm, linearity range is narrower, and sensitivity is highest. Thus, compared generally, the best project is the state of d =300 μm.

关 键 词：间距 姿态 敏感结构 流场 

分 类 号：TN379[电子电信—物理电子学]