复杂光学系统中的干涉条纹图像的精确仿真方法  

Precision Simulation Method for Images of Interference Fringe Pattern in Complex Optical System

作　　者：方素平[1] 小森雅晴[2] 久保爱三[2] 梅雪松[1] 

机构地区：[1]西安交通大学机械制造系统工程国家重点实验室,西安710049 [2]日本京都大学工学院精密工学系 京都 606-8501日本

出　　处：《机械工程学报》2009年第1期244-252,共9页Journal of Mechanical Engineering

基　　金：教育部博士点基金资助项目(20050698008)。

摘　　要：精密复杂曲面形状的干涉测量光学系统的设计和测量误差分析一般采用光线追迹的方法进行,但用传统方法进行追迹计算时,计算结果不能用直观的干涉条纹仿真图像的形式来表示,常常难以有效地进行分析和判断。在提出的考虑光学元件安装误差的精确光线追迹方法的基础上,对来自于测量对象面的物体光的光程差的精确计算方法、和与物体光的位置对应的参照光侧的光线追迹方法进行探讨,给出物体光与参照光的位相差的精确计算方法,提出一种实用的干涉条纹仿真图像的作成方法,及测量对象面仿真计算的初始化方法,再以平面测量试验片和齿轮齿面为对象,进行仿真计算和实测,验证所提出的方法的正确性。The design and the error analysis of optical interferometry system to measure the form of precise and complicated surface are generally carried out by using ray tracing method. However, when traditional method is used for tracing calculation, the calculation result cannot be represented in the form of intuitive simulation image of interference fringe pattern, so it is often difficult to carry out analysis and judgment effectively. On the basis of a proposed precision ray tracing method that takes the installation error of optical element into consideration, the precision calculation method for the optical path difference of objective lights from the measured object surface, and the tracing method for the ray on the reference light corresponding to the position of object light are discussed. An accurate calculation method of phase differences between object light and reference light is given. At the same time, a practical method to make an interference fringe simulation pattern, as well as other important methods such as initialization method of measured surfaces for simulation is presented. Simulation and measurement are carried out by taking the plane measurement test piece and gear flank as objects, and the correctness of the proposed method is verified.

关 键 词：光线追迹 图像仿真 干涉条纹 激光干涉 光程 位相差 

分 类 号：TN247[电子电信—物理电子学]