电子束重复曝光加工PCR微通道的工艺研究  

Research on Microchannel Fabrication of PCR Chip by Electron Beam Lithography Based on Overlapped Scanning

作　　者：孔祥东[1,2] 冯圣玉[1] 张玉林[3] 

机构地区：[1]山东大学化学与化工学院,济南250100 [2]东营职业学院科研处,山东东营257091 [3]山东大学控制科学与工程学院电子束研究所,济南250061

出　　处：《微纳电子技术》2009年第1期41-44,共4页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(10572078);山东省博士后择优资助科研项目(200603004);山东省自然科学基金资助课题(Y2003G03)

摘　　要：对PCR微流控芯片通道中流体的流动特性进行了分析,发现流体在横截面为圆形的通道中流动时由摩擦引起的等效水头损失及表面张力均小于微矩形通道。以此为依据,将PCR芯片微通道优化设计成圆形通道。在JSM-5CF电子束曝光机上采用束斑尺寸80nm、能量20keV的电子束对1μm厚的聚甲基丙烯酸甲酯进行了单次曝光剂量40μC/cm2的8次重复增量扫描曝光实验,显影后得到的PCR芯片微圆通道轮廓清晰,边缘连续光滑。证明了电子束重复增量扫描曝光方式制作PCR微流控芯片微圆通道的可行性。The flow characteristics of fluids in micro-flow channels of polymerase chain reaction （PCR） chips is analyzed. The result shows that the equivalent head loss caused by the friction and the surface tension of the circular microchannels are smaller than those of the rectangular ones with the same cross-section area when the liquid is flowing in the circular microchannels. Based on the phenomenon, the microchannel structure of the micro-flow PCR chip was optimized to be circular. Eight overlapped increment scanning exposure experiments were conducted on 1 μm PMMA in the JSM-35CF electron beam lithography system at 20 keV with 80 nm beam spot and 40μC/cm2 single exposure dose. The distinct circular microchannels of the PCR chip are obtained with smooth brims after the development. The result means that the overlapped increment scanning can be used to fabricate of the circular microchannels of the PCR chips.

关 键 词：电子束曝光 重复增量扫描 聚合酶链式反应(PCR)微流控芯片 流体 微通道 

分 类 号：TN305.7[电子电信—物理电子学] TN703