姿态参照系统中硅微机械加速度计的温度补偿  

Temperature Compensation of MEMS Accelerometer in Attitude Heading Reference Systemm

作　　者：符强[1] 马炳和[1] 常洪龙[1] 

机构地区：[1]西北工业大学微/纳米系统重点实验室,陕西西安710072

出　　处：《仪表技术与传感器》2009年第1期12-14,17,共4页Instrument Technique and Sensor

摘　　要：微机械加速度计的输出受到环境温度的影响。文中以姿态参照系统为例,通过温度实验,得到了姿态参照系统中的微机械加速度计在不同温度下的输出,通过数据拟合建立了静态温度模型,对加速度计的零偏和标度因子进行了补偿。在姿态参照系统中对该温度补偿模型进行试验,结果表明得到的模型可以有效地补偿系统中的微机械加速度计的温度误差,使加速度计随温度变化的稳态输出变化的数量级由10-3减小到10-4。该温度补偿方法也适用于其他MEMS惯性测量系统中的微机械加速度计的温度补偿。The output of MEMS accelerometer is influenced by the environment temperature. This paper presented the temperature compensation method of the MEMS accelerometer in the attitude heading reference system （AHRS）. Through temperature experiment, the MEMS accelerometer output was obtained at different temperature. And the static temperature model was established through data estimation to compensate the zero output and the scale factor. The temperature model was utilized in the AHRS, and the test results showed effective temperature compensation. The temperature variance of the MEMS accelerometer output reduced from 10^-3 to 10^-4. This temperature compensation method is also applicable to other accelerometers in MEMS inertial measurement unit.

关 键 词：微机械加速度计 姿态参照系统 温度补偿 

分 类 号：TH824[机械工程—仪器科学与技术]