小尺寸2D密闭腔气体摆特性的有限元分析  

FEM analysis of the gas pendulum characteristic for two-dimensional (2D) enclosure with small size

作　　者：朴林华[1] 丁霞[2] 宋佳[1] 刘玉洁[1] 李言杰[1] 

机构地区：[1]北京信息科技大学北京市传感器重点实验室,北京100101 [2]青岛科技大学数理学院,山东青岛266061

出　　处：《电子元件与材料》2009年第2期45-47,共3页Electronic Components And Materials

基　　金：国家自然科学基金资助项目(No.60772012);北京市教委面上资助项目(No.KM00710772009);北京市优秀人才培养项目;北京市传感器重点实验室开放课题;北京市属市管高校人才强教计划资助项目

摘　　要：采用有限元法,计算了小尺寸2D密闭腔中点热源引起的对流场和温度场,从而验证和解释了小尺寸密闭腔内自然对流气体的摆特性。结果表明:(1)无论是在水平状态还是在倾斜状态,在浮升力的作用下密闭腔内自然对流气体的方向总是竖直向上,具有摆的特性;(2)热源两侧原来处在同一条等温线上两点的温度不再相等,倾斜10°时,温度之差为20K;倾斜20°时,温度之差为40K。微机械气流式水平姿态传感器利用这一特性可敏感倾斜角度。The convection and temperature fields caused by point heat source were obtained with the method of FEA （finite element analysis）, and the pendulum characteristic of nature convection gas in two-dimensional enclosure with small size was validated and explained. The results are as follow： （1） whether in horizontal status or in tilting status, under the function of buoyancy lift, the direction of nature convection gas always keeps vertical upwards in two-dimensional enclosure, and it has the pendulum characteristic. （2） the temperatures of two points on the same isotherm are no longer equal. When the tilt angle is 10°, the temperature difference is 20 K; when the tilt angle is 20°, the temperature difference is 40 K. The tilt angle can be measured by using this characteristic of MEMS airflow level posture sensor.

关 键 词：有限元法 气体摆 小尺寸 对流场 温度场 

分 类 号：TN379[电子电信—物理电子学]