平面磁芯螺旋结构微电感的性能研究  

Study on property of planar spiral structure microinductor with magnetic core

作　　者：冯书谊[1] 周勇[1] 周志敏[1] 向毅[1] 

机构地区：[1]上海交通大学微纳科学技术研究院,微米/纳米加工技术国家级重点实验室,薄膜与微细技术教育部重点实验室,上海200240

出　　处：《电子元件与材料》2009年第2期48-50,共3页Electronic Components And Materials

基　　金：国家"863"计划资助项目(No.2006AA03Z301);上海市科委资助项目(No.0652nm004;No.0752nm004);重点实验室基金资助项目(No.9140C7903090707);基础科研资助项目(No.D2320060098)

摘　　要：采用MEMS技术（包括光刻、电镀、反应离子刻蚀和机械抛光等）研制了平面磁芯螺旋结构微电感，磁芯材料为铁基纳米晶带材。其中线圈匝数为18匝，线圈导体的宽度和间隙均为30μm，厚度为20μm；电感的尺寸为3mm×3mm。测试结果表明：在频率为1-10MHz时，电感量和品质因数分别为3．2～1．2μH和2．3—1．1；在1MHz下，电感量和品质因数分别为3．2μH和2．3，可应用于微型化DC／DC变换器。A planar spiral structure microinductor with Fe-based nano-crystalline ribbon as magnetic core was fabricated by MEMS technology, including photoetching, electroplating, RIE and mechanical polishing etc. The dimension of microinductor is 3 mm×3 mm with 18 coil turns, 30 μm in width and space, 20 μm in coil thickness. The results show that the inductor has a good property in 1-10 MHz with inductance of 3.2-1.2 μH and quality factor of 2.3-1.1, respectively The inductance is 3.2 μH with quality factor of 2.3 at 1 MHz, and it is attractive for the application of micro DC/DC converter.

关 键 词：平面磁芯螺旋结构微电感 MEMS技术 电感量 品质因数 

分 类 号：TM55[电气工程—电器]