飞秒激光烧蚀材料表面产生纳米波纹结构的实验  

Nano-Ripples Structure on Material Surface During Femtosecond Laser Ablation

作　　者：倪晓昌[1,2] 孙琦[1] 陈永耀[1] 李海燕[3] 王清月[1] 柴路[1] 贾威[1] 

机构地区：[1]天津大学光电信息技术科学教育部重点实验室,天津300072 [2]天津工程师范学院电子工程学院,天津300222 [3]天津大学电子信息工程学院,天津300072

出　　处：《纳米技术与精密工程》2009年第1期47-50,共4页Nanotechnology and Precision Engineering

基　　金：国家自然科学基金资助项目(60278003;60608004);教育部重大研究项目(10410);天津市科技攻关培育项目(043103911);天津工程师范学院课题项目(HX08051);天津工程师范学院科研发展基金资助项目(KJ-JH2007015)

摘　　要：利用飞秒脉冲激光烧蚀可以获得远小于激光中心波长(775nm)量级的周期条纹.通过多脉冲飞秒激光烧蚀Ni、Al、Cu、Ti和Si等材料表面的实验,得到材料表面产生光栅的周期均小于飞秒激光中心波长;采用对比实验,改变入射光的偏振特性,发现波纹周期方向随入射光偏振方向的改变而改变;不改变激光偏振态、脉冲能量为4.2J/cm2时,沿波纹周期走向,发现平台移动速度为0.1mm/s时,可获得清晰的551nm的金属周期结构;最后应用上述实验结果,在铜片表面制备了长为几十微米、周期为551nm的微纳光栅结构.Some period ripples can be obtained on material surface during femtosecond laser ablation, and the spacing between ripples is much shorter than the center wavelength （ 775 nm） of laser. Several kinds of materials, such as Ni, Al, Cu, Ti, and Si, were ablated by multi-pulse femtosecond laser. The experimental results show that all of the ripple spacings are shorter than the laser center wavelength. When the polarization of incident laser changed with some different angles, the direction of ripple period changed accordingly. While, if the laser ＇polarization did not change and material moved in the ripple period direction with the speed of 0.1 mm/s, a 551 nm period ripple structure could be obtained on metal surface at 4.2 J/cm^2 laser fluence. Finally, long period grating structure, which was several tens micrometers in length and 551 nm in width, was fabricated on the copper surface based on the above experimental results.

关 键 词：飞秒激光 纳米波纹 激光烧蚀 光栅 

分 类 号：TN249[电子电信—物理电子学]