一种新型微波等离子体增强辉光放电光源基本特性的研究  

STUDIES ON THE GENERAL PROPERTIES OF A NOVEL MICROWAVE PLASMA ENHANCED GLOW DISCHARGE SOURCE

作　　者：李一木[1] 杜朝晖[1] 段忆翔[1] 张寒琦[1] 金钦汉[1] 刘鸿石[2] 

机构地区：[1]吉林大学化学系 [2]吉林大学科教仪器厂

出　　处：《光谱学与光谱分析》1998年第2期205-208,共4页Spectroscopy and Spectral Analysis

基　　金：国家自然科学基金

摘　　要：本文介绍了一种改进型的微波等离子体增强辉光放电光源。对它的结构，操作以及工作参数（工作气压Ｐ、电流强度Ｉ，电压Ｖ、微波功率Ｗ）和溅射等进行了详细的讨论。This paper introduced a novel microwave plasma enhanced glow descharge source,the structure design and operation were decribed,and the mutual effects of the main characters,such as pressure,current,voltage,microwave power and sputtering rates were also investigated in details.

关 键 词：微波等离子体 辉光放电光源 增强 激发 

分 类 号：O652.2[理学—分析化学]