在扫描电镜中以法拉第筒获得透射电子像的方法  

A Method of Obtaining Transmitted Electron Image Using the Faraday Cup in the SEM

作　　者：赵永生[1] 

机构地区：[1]吉林大学分析测试中心

出　　处：《吉林大学自然科学学报》1990年第3期62-64,共3页Acta Scientiarum Naturalium Universitatis Jilinensis

摘　　要：考查一下IITRI(1975)会议文集上的照片我们不难看到,样品吸收电流的应用几率小于1％。然而,样品吸收电流模式在某些方面,如在电子探针显微分析和电子束感生电流信号检测中的应用,有其独特的优点。在本文中我们将讨论样品电流模式的另一种用途。In the SEM, a special specimen stage has been designed for transmitted electron image studies. The conventional transmitted electrons detector consists of scintillator, light-pipe and photomutiplier tube, but the system construction is complicated. In this paper, a new method to detect transmitted electrons is described. The 'Faraday Cup' was used as a detector only. The detecting process is incident electron beam passing through the specimen→the Faraday Cup recording transmitted electrons→ generating absorbed electrons→the signal being amplified with the specimen current amplifier→controlling CRT image.

关 键 词：扫描电镜 法拉第筒 透射电子像 

分 类 号：TN16[电子电信—物理电子学]