短波CMT红外光导探测器延伸电极的改进  

The Shortwave Band CMT Infrared Photoconductive Detector Outstretched Electrode

作　　者：史琪[1] 王向前[1] 汤金春[1] 铁筱滢[1] 

机构地区：[1]昆明物理研究所,云南昆明650223

出　　处：《红外技术》2009年第2期84-86,94,共4页Infrared Technology

摘　　要：针对短波CMT红外光导探测器出现的拖尾问题,找到其拖尾的原因:过渡电极的功函数过大。为此,在原来Cr/Au电极的基础上,提出了In/Au+Cr/Au电极初步解决了拖尾问题,但是在工艺上出现了In聚球现象,影响器件的稳定性。又提出Ti/Au电极,比较好的解决了拖尾问题和In/Au+Cr/Au电极带来的工艺问题。Aim at it appear problem of dragged cauda, that is the shortwave band CMT infrared photoconductive detector, The cause of discovered its dragged cauda： the work function of transitional electrode is over high. At the basic of original Cr/Au electrode, we bring forward In/Au＋Cr/Au electrode, it solves the problem of dragged cauda, but appear the phenomenon of congregated In ball at the technics, effect the stability of detector. Bring forward Ti/Au electrode, it solves the problem of dragged cauda, and In/Au＋Cr/Au electrode bring the problem of technics.

关 键 词：功函数 Cr/Au电极 In/Au+Cr/Au电极 Ti/Au电极 

分 类 号：TN215[电子电信—物理电子学]