恒流法制备图案化的阳极氧化铝模板  

Preparation of patterned anodic aluminum oxide template by constant current density process

作　　者：邵增军[1] 彭智[1] 宋国君[1] 李晓茹[1] 王树龙[1] 

机构地区：[1]青岛大学高分子材料研究所,山东青岛266071

出　　处：《功能材料》2009年第2期305-307,310,共4页Journal of Functional Materials

基　　金：国家自然科学基金资助项目(50473012)

摘　　要：采用紫外线光刻技术在铝片上生成预设图案，用恒流二次氧化法在图案化的铝片上生长AAO，以此模板制备了PS和Cu纳米线阵列。采用扫描电子显微镜（SEM）分析。结果表明，制备的图案是直径5μm的圆形组成，圆形图案中心之间距离是10gm，每个圆中生长了均匀的AAO，孔径大约为60-80nm。Ultraviolet radiation（UV）photolithographic methods are utilized to form set patterns onto aluminum plate. AAO formed in this patterned aluminum plate. Then, polystyrene one-dimensional nanostructures are prepared by this modified template. The products were characterized by scanning electron microscopy （SEM）. The results illustrated that the pattern contains many identical circular structures; the diameter of each rotundity is about 5/Lm. And the space between circularities is also 10μm. Each rotundity have highly ordered AAO pores with diameters of 60-80nm

关 键 词：紫外光 一维纳米结构 光刻胶 图案化模板 

分 类 号：TB383[一般工业技术—材料科学与工程]