轻型反射镜研究与发展  

Investigated and development of lightweight mirror

作　　者：齐亚范[1] 方敬忠[1] 杨力[1] 吴时彬[1] 熊胜明[1] 张云洞[1] 

机构地区：[1]中国科学院光电技术研究所

出　　处：《光学技术》1998年第3期49-52,共4页Optical Technique

摘　　要：应用有限元分析方法研究了自重对轻型反射镜变形的影响，反射镜轻量化技术及关键材料，并研制出Φ６３０ｍｍ轻型熔石英反射镜；高温２００℃、低温－４０℃及５年时效对面形稳定性影响；轻型熔石英反射镜加工技术；轻型反射镜宽带高反射膜系及镀膜技术。利用上述技术研制出Φ３００ｍｍ、Φ４１０ｍｍ、Φ４７０ｍｍ及Φ６３０ｍｍ球面及非球面熔石英轻型反射镜及平面反射镜。轻型反射镜减重达７０％，Φ６３０ｍｍ轻型非球面反射镜仅重２０．２ｋｇ。Φ４７０ｍｍ球面轻型反射镜加工后面形ＰＶ值０．１１７λ，ＲＭＳ值０．０２４λ（λ∶６３２．８ｎｍ）。Influence of weight of lightweight mirror on surface deformation was studied by finite element analysis method. The lightening technique of mirror and key materials was studied and a Φ 630mm lightweight fused mirror was developed. The effects of high temperature (200℃), low temperature (-40℃) and five year’s ageing on figure stability were investigated. Optical fabrication technique, coating technology and wide high reflective film system of lightweight mirror were also studied.Lightweight spherical and aspherical fused sillica mirror 300mm, 410mm, 470mm and 630mm in diameter and some plane mirrors were manufactured. The weight of lightweight fused sillica mirror was reduced about 70%. Figure of 470mm spherical fused silica lightweight mirror was 0.117λ in P V, 0.024λ in RMS (λ∶632.8nm).

关 键 词：轻型 反射镜 熔石英 有限元 变形分析 光学元件 

分 类 号：TH740.1[机械工程—光学工程]