消除参考光不同轴对非球面检测影响的研究  

Study on eliminating the effects in testing aspherical surface of reference light with different axis

作　　者：张海涛[1] 钱晓凡[1] 张永安[1] 胡特[1] 

机构地区：[1]昆明理工大学理学院激光研究所,昆明650051

出　　处：《激光杂志》2009年第1期47-48,共2页Laser Journal

基　　金：云南省教育厅基金项目

摘　　要：非球面与球面相比具有更好的光学性质,应用越来越广泛,但一直受到光学加工和检测技术的限制。用计算全息的方法对非球面进行干涉检测,是目前最成功和最重要的检测方法之一。但在实际检测中会遇到光路调整困难的问题,其中由于光路调整误差,导致由计算全息图(CGH)重现的理想非球面波面与实际待检测非球面波面不同轴是经常遇到的,限制了该检测方法的使用和推广。文章针对这个问题,研究了在光路调节的过程中存在一定离轴的情况下,通过软件对离轴误差进行修正,模拟计算和实验检测证明该方法可以取得很好的修正效果,大大降低了光路调整的难度,有利于该检测方法的推广。Aspherical surface has more advantages than spherical surfaee on optical characteristic and has more application , but it has been limited by optic processing and testing technique. Testing aspherical surface with CGH interferometry is the most successful and important testing method at present. In fact, we met the difficulty of adjusting light path that result in reconstruction ideal aspherieal surface with CGH and actual aspherical surface do not keep on the same axis , which limited usage of test and expand. This ＇,article just discuss the problem that there is partly on different axis when light path is adjusted. By calculation , we correct the inaccuracy which is caused by the light on different axis.And we get useful amendable effectiveness that is proved by simulative calculation and experi- mental. This method can enormously simplify adjustment of light path and make for expanding test method.

关 键 词：非球面检测 不同轴 误差消除 光路调整 

分 类 号：O438.1[机械工程—光学工程] TN248.1[理学—光学]