基于单片机的四探针测试系统的研制  

Development of a four-point probe measuring system based on MCU-51

作　　者：常涛[1] 孙以材[1] 潘国峰[1] 

机构地区：[1]河北工业大学微电子研究所

出　　处：《传感器世界》2009年第2期52-56,47,共6页Sensor World

摘　　要：利用改进的Rymaszewski法自动消除探针纵向游移影响的优点,将它应用于斜置式方形探针测试法中;在斜置式方形四探针机械平台的基础上,完成了整个测试电路的硬件设计和软件编程,研制出一台具有输出高精度高稳定性恒流源的斜置式方形探针分析仪。该系统是基于单片机的智能化控制系统,实现了10μA^1mA、步长为10μA的高精度数字控制恒流源,具有较高精度的电压测量电路,并能和上位机PC进行RS-232串口通讯。The following researches are accomplished in this paper： Firstly, a modified Rymaszewski method is applied in tilting square probe test system because of the advantage of this method in auto-eliminating the influences of longitudinal drift. Secondly, a tilting square probe test system with a high -accuracy and high-stability constant current source is design based on the tilting square four-point probe mechanical platform, including its hardware design and software program. The system is a intelligent control system base on the singlechip technology. In this system, a high-accuracy numerical-control constant current source with range of 10μA to lmA and stepsize of 10μA is achieved .The voltage measuring circuit has high precision. The system can communicate with PC computer by RS-232 serial bus.

关 键 词：四探针测试技术 微区薄层电阻 改进Rymaszewski法 数控恒流源 

分 类 号：TP274.4[自动化与计算机技术—检测技术与自动化装置] TP368.12[自动化与计算机技术—控制科学与工程]