MEMS压力传感器的温度补偿  

MEMS Pressure Sensor Temperature Compensation

作　　者：关荣锋[1] 王晓雪[2] 

机构地区：[1]河南理工大学材料科学与工程学院 [2]河南理工大学理化系,河南焦作454003

出　　处：《河南师范大学学报（自然科学版）》2009年第1期70-73,共4页Journal of Henan Normal University(Natural Science Edition)

基　　金：国家"863"计划MEMS重大专项(2004AA404221);河南省科技攻关计划项目(0624220036)

摘　　要：研究了恒流激励条件下批量温度补偿的方法.零点的温度补偿是通过在桥臂上并联阻值较大且恒定的电阻来实现的,而灵敏度的温度补偿则是在整个桥臂上并联阻值较小且恒定的电阻来实现的,补偿后零点温漂为0.004%～0.015%FSO/℃,灵敏度温漂为0.0035%～0.024%FSO/℃,这表明这种补偿方法具有良好的效果.A method of batch temperature compensation is researched. The zero point temperature compensation is realized by paralleling a big and consistent resistant in a bridge arm, and the sensitive temperature compensation is realized by paralleling a small and consistent resistant in whole bridge arm. The zero point temperature drifts are the 0. 004% -0. 015% FSO/℃, and the sensitivity temperature drifts are the 0. 003 5%-0. 024 %FSO/℃ after the compensation. These results demonstrate that the compensation method has a very good effect.

关 键 词：MEMS 压力传感器 温度补偿 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]