基于WO_3薄膜的双声路声表面波型SO_2气体传感器  

Dual track surface acoustic wave SO_2 gas sensor based on WO_3 films

作　　者：文常保[1,2] 朱长纯[2] 巨永锋[1] 邱彦章[1] 许宏科[1] 胡小东[2] 吴媛[2] 刘君华[2] 

机构地区：[1]长安大学电子与控制工程学院,西安710064 [2]西安交通大学电子与信息工程学院,西安710049

出　　处：《功能材料与器件学报》2009年第1期1-6,共6页Journal of Functional Materials and Devices

基　　金：国家自然科学基金资助项目(60176020;60476037);教育部博士点基金资助项目(20020698014)

摘　　要：以金属钨粉,H2O2,CH3OH和PVP(聚乙烯吡咯烷酮)为原料,利用热喷射方法在双声路声表面波器件的测量声路上制作了细微多网孔状WO3薄膜,提出并实现了一种在常温下可以实现对二氧化硫(SO2)气体进行物理吸附和解吸附的基于WO3薄膜的双声路声表面波型SO2气体传感器。声表面波器件的双声路结构消除了由于外界测量条件改变引起的测量误差,也进一步提高了传感器的可靠性和准确性。实验结果表明,该传感器具有好的重复性,在测量范围内对各种浓度的SO2气体具有好的响应特性;传感器在0.5ppm到20ppm浓度范围内的线性灵敏度大约为6.8KHz/ppm。A novel scheme of dual track surface acoustic wave SO2 gas sensor based on WO3 （Tungsten trioxide） films is proposed. Utilizing Tungsten powders, HE O2, CH3 OH and PVP as raw materials and pyrogenation spray method, micro - porous networks WO3 film is fabricated in measure acoustic track of dual track surface acoustic wave device. The SO： gas sensor using dual track surface acoustic wave device based on WO3 films would absorb and desorbed SO2 gas in physical method under normal temperature. Because the dual track receiving structure is incorporated into the sensor, the environment disturbance quantities for measurement signal are eliminated, and the reliability and veracity are further improved. Experiments resuits confirm that the dual track surface acoustic wave SO： gas sensor based on WO3 films is endowed with better reproducibility, and excellent response performance for different concentration SO2 gas in the measurement range, and the linearity sensitivity reaches to 6.8 KHz/ppm from 0.5ppm to 20ppm.

关 键 词：声表面波器件 WO3薄膜 SO2气体 传感器 PVP 

分 类 号：TN65[电子电信—电路与系统] TP212[自动化与计算机技术—检测技术与自动化装置]