大位移MEMS静电梳齿驱动器的设计及制作  

Design and fabrication of MEMS comb-drive actuator with large displacement

作　　者：明安杰[1,2] 李铁[1] 王跃林[1] 

机构地区：[1]传感技术联合国家重点实验室微系统技术国家级重点实验室中国科学院上海微系统与信息技术研究所,上海200050 [2]中国科学院研究生院,北京100039

出　　处：《功能材料与器件学报》2009年第1期7-14,共8页Journal of Functional Materials and Devices

基　　金：上海市教委科研创新项目(项目编号:08LZ142);上海高校选拔培养优秀青年教师科研专项基金(批准号:B01601);上海市重点学科建设项目(项目编号:P1303)资助

摘　　要：文章提出了一种大位移低驱动电压的MEMS静电梳齿驱动器,对器件进行了设计、模拟、制作以及测试。梳齿驱动器的侧向不稳定性即侧向吸合现象限制了梳齿驱动器的最大驱动位移,发现侧向稳定因子S,随支撑梁刚度比ky/kx以及梳齿间隙g的增加而增加,随梳齿交叠长度的增加而减小;而驱动器的驱动电压随梳齿间隙的增加而升高。在以上研究的基础上,提出了一种采用小间隙无初始交叠、长度线性递增梳齿结构和高纵/横向刚度比的预弯曲支撑梁结构的梳齿驱动器。器件测试结果表明,驱动电压71V时,可以达到100μm的驱动位移,进一步测试表明,驱动器的基模共振频率为573Hz,Q值为35.88。The design, simulation and performance tests of a comb -drive actuator with displacement up to 100μm at driving voltage lower than 75V is presented. As the maximum displacement of comb - drive actuator is restricted by electromeehanical side instability namely side pulling effect, analysis of side stability, S, are developed to enlarge the displacement. It was found that the S may increase with the increasing suspension stiffness ratio ky/kx and comb gap, but decrease with the engagement area, while driving voltage decreases with the increasing comb gap. Based on these principles, a comb-drive actuator with small comb gap, high- stiffness-ratio prebent suspension beams, non -initial overlap and linear-engaged-length comb teeth is proposed. Experiments indicate that the actuator resonates at 573 Hz with Q factor of 35.88 and reaches the maxi- mum displacement over 100μm at driving voltage of 71V.

关 键 词：MEMS 梳齿驱动器 侧向稳定性 预弯曲梁 

分 类 号：TN303[电子电信—物理电子学]