新型高灵敏度GLV光学电流传感器设计与性能分析  

Design and performance analysis of a novel optical current sensor based on GLV technology

作　　者：鲁亮[1,2] 穆参军[1,2] 李四华[1,2] 吴亚明[1] 

机构地区：[1]中科院上海微系统与信息技术研究所传感技术国家重点实验室,上海200050 [2]中科院研究生院,北京100039

出　　处：《功能材料与器件学报》2009年第1期39-45,共7页Journal of Functional Materials and Devices

摘　　要：本文结合GLV技术设计了一种适于检测高压交流电的新型光学电流传感器。这一设计具有温度稳定性好、大电流下灵敏度高、频率响应范围宽等特点,且测量芯片制作工艺简单、成本低廉。通过有限元分析和数值计算对器件的模态、工作性能、热膨胀特性等进行了分析模拟,结果表明:测量芯片量程达500A^2000A,并可通过改变设计参数灵活调整;一阶固有频率接近60kHz,大电流下灵敏度接近0.2dB/A,外界温度变化±50K时传感器测试误差在0.7%以内。A novel optical current sensor detecting high alternating current is designed based on Grating Light Valve technology. This device features excellent frequency response, temperature stability and sensitivity at high current, while its fabrication is simple and cost -effective. Finite element analysis and numerical calculation reveal that the alternating current with peak value ranging from 500A to 2000A can be detected by the device ; 1 st order resonant frequency is approximately 60kHz and the sensitivity at high current can reach 0.19dB/A; when temperature varies ±50K, measurement error is around 0.7%.

关 键 词：光栅光阀(GLV) 光学电流传感器 双端固支梁 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]