类金刚石薄膜纳米摩擦性能的试验研究  

Experimental Research on Nano-tribological Properties of Diamond-like Carbon Films

作　　者：张晶[1,2] 范真[2] 

机构地区：[1]镇江高等专科学校机械系,江苏省镇江市212003 [2]江苏大学

出　　处：《工具技术》2009年第2期38-40,共3页Tool Engineering

摘　　要：利用摩擦力显微镜(FFM),对由等离子体增强化学气相法沉积的类金刚石(DLC)薄膜的纳米摩擦性能进行了试验研究。用原子力显微镜(AFM)观察了DLC薄膜样品的表面形貌,同时测定了其粘附力值。从外加载荷、扫描速度和湿度的角度分析了薄膜的摩擦特性。The nano-tribological properties of dialnond-like carbon （DLC） films deposited by plasma-enhanced CVD were experimentally researched by nano-scale friction tests with FFM. The surface topographies of DLC film samples were observed by AFM, and the adhesive forces were also measured at the same time. The exteaml load, scanning velocity and humidity were taken into account to investigate the frictional properties of the prepared DLC films.

关 键 词：类金刚石薄膜 摩擦性能 摩擦力显微镜 

分 类 号：TH117.1[机械工程—机械设计及理论] TN304.18[电子电信—物理电子学]