直流磁控反应溅射法制备大面积AZO薄膜的实验研究  

Prepareation of Large Area Al-ZnO Thin Film by DC Magnetron Sputtering

作　　者：焦飞[1] 廖成[1] 韩俊峰[1] 周震[1] 

机构地区：[1]北京大学物理学院重离子物理研究所,北京100871

出　　处：《光谱学与光谱分析》2009年第3期698-701,共4页Spectroscopy and Spectral Analysis

基　　金：北京市自然科学基金项目(H030630010120)资助

摘　　要：用锌铝合金靶在苏打玻璃上制备大面积AZO半导体透明薄膜,降低了靶材费用。实验中采用靶体旋转的直流磁控溅射工艺,提高了靶材利用率,实现了大面积均匀镀膜,并能获得定向生长的薄膜。文章介绍了采用该方法制备大面积薄膜的实验,并用X射线衍射仪、扫描电子显微镜等多种分析方法对大面积薄膜的结构、形貌、电学性能及光学性能进行分析,实验结果表明,采用合金靶做靶源,氩作工作气体,控制好氧气分压,大功率溅射可以获得定向性好、致密、均匀、透射率高、电阻率低的优质大面积(300 mm×300mm)AZO薄膜。Solar cells of p-CIS/n-buffer/ZnO type, where CIS is CulnS2, CulnSe2 or intermediates, are thin-film-based devices for the future high-efficiency and low-cost pbotovoltaic devices. As important thin film, the properties of Al-doped ZnO （AZO） directly affect the parameter of the cell, especially for large volume. In the present paper, AZO semiconductor transparent thin film on soda-lime glass was fabricated using cylindrical zinc-aluminum target, which can not only lower the cost of the target but also make the preparation of large area AZO thin film more easily. Using the DC magnet sputtering techniques and rolling target, high utilization efficiency of target was achieved and large area uniform and directional film was realized. An introduction to DC magnet sputtering techniques for large area film fabrication is give.n. With different measurement methods, such as X-ray diffraction （XRD） and scan electron microscope （SEM）, we analyzed large size film＇s structure, appearance, and electrical and optical characteristics. The XRD spectrum indicated that the AZO film shows well zinc-blende structure with a preferred （002） growth and the c-axis is oriented normal to the substrate plane. The lattice constant is 5. 603 9nm and the mismatch with CdS thin film is only 2 percent. It absolutely satisfied the demand of the CIGS solar cell. The cross-section of the AZO thin film indicates the columnar structure and the surface morphology shows that the crystal size is about 50 nm that is consistent with the result of XRD spectrum. By the optical transmission curve, not only the high transmission rate over 85 percent in the visible spectrum between 400 nm and 700 nm was showed but also the band gap 3. 1 eV was estimated. And all these parameters can meet the demand of the large area module of CIGS solar cell. The result is that using alloy target and Ar gas, and controlling the appropriate pressure of oxygen, we can get directional, condensed, uniform, high transmitting rate, low resistance and large size （

关 键 词：ZNO ZnO∶Al 反应溅射 大面积薄膜 

分 类 号：TB43[一般工业技术] TN304.2[电子电信—物理电子学]