LCoS平板微显示驱动技术研究  

Study on Micro Display Technology of LCoS

作　　者：王文博[1] 王晓慧[1] 黄苒[1] 欧毅[1] 杜寰[1] 夏洋[1] 韩郑生[1] 冯亚云[2] 凌志华[2] 

机构地区：[1]中国科学院微电子研究所,北京100029 [2]中国科学院长春光学精密机械与物理研究所,长春130033

出　　处：《半导体光电》2009年第1期38-42,共5页Semiconductor Optoelectronics

基　　金：国家“973”计划资助项目(2003CB314705)

摘　　要：研究了硅基液晶(LCoS)微显示驱动电路的制备工艺、电路设计、版图绘制以及显示功能测试。采用化学机械抛光(CMP)工艺实现硅片表面平坦化方案,满足了LCoS微显示对表面平整度的要求;合理布设两层金属布线,巧妙实现遮光作用;利用剥离的方法制备Ag反射电极,解决了Ag工艺与标准CMOS集成电路工艺的兼容问题;在硅基片上制作出U形PAD,通过导电胶与公共电极ITO相接。电路设计中采用了对台阶电平计数的办法实现DA转换的功能,既降低了电路设计难度,又方便测试过程中对灰度电平的调整。制备出LCoS微显示驱动面板,实现了QVGA分辨率、16级灰度LCoS、帧频50 Hz的视频显示。Fabrication process, circuit design, layout and function test of LCoS micro display are studied. CMP process is used to planarize the chip to meet the demand of LCoS display. Double layers of Al are arranged to protect the MOS devices from damage of back lamp- house. Lift-off process is used to form the Ag reflecting electrode to improve the compatibility with the standard CMOS process. U-shaped pad is fabricated to connect ITO common electrode by electric glue. DA converters are made up of a counter and comparators, which simplified circuit design and is convenient for voltage adjust. And finally, LCoS micro display panel with QVGA resolution, 16 grey levels and 50Hz frame frequency is realized.

关 键 词：硅基液晶 平板微显示 镜面电极 遮光层 

分 类 号：TN47[电子电信—微电子学与固体电子学]