特气业与半导体业的发展近况  

Recent Developments of The Specialty Gases And Semiconductor Industry

作　　者：林刚[1] 

机构地区：[1]光明化工研究设计院,辽宁大连116031

出　　处：《低温与特气》2009年第1期4-8,共5页Low Temperature and Specialty Gases

摘　　要：首先综述了我国半导体产业近年发展概况,然后论述了特气相关行业的配套发展问题,同时也介绍了世界及我国知名气体企业的应对措施。Summarized recent developments of the semiconductor industry in China, and then expounded the supporting measures for the specialty gases industry. Also introduced the reply measures of the well-known gas enterprise in the world and our country.

关 键 词：半导体 晶圆 集成电路 特种气体 配套 

分 类 号：F426.7[经济管理—产业经济] F426.63