适用于精密复杂零件表面形状的干涉测量光学系统的光线追迹方法  

Ray Tracing Method for Optical System of Interferometry Measurement Used for Form Deviation of Precise Complex Surface of Machine Parts

作　　者：方素平[1] 小森雅晴[2] 久保爱三[2] 梅雪松[1] 

机构地区：[1]西安交通大学机械制造系统工程国家重点实验室,西安710049 [2]日本京都大学工学院,日本京都606-8501

出　　处：《机械工程学报》2009年第2期170-177,共8页Journal of Mechanical Engineering

基　　金：教育部博士点基金资助项目(20050698008)

摘　　要：在用激光干涉法测量精密复杂机械零件的表面形状误差时,需要用光学仿真的方法对干涉测量光学系统进行设计和误差分析。以研究中所用的光学系统为基本模型,提出均质媒质中的两个带有安装误差的任意界面曲面之间的光线追迹的一般方法,从任意一个3维界面曲面到平面、球面和圆柱面等若干个典型界面曲面之间的光线追迹方法,和由若干段均质媒质构成的光学系统中的光线追迹方法,并对测量对象面的成像形状的求解方法进行探讨,再以平面测量试验片和齿轮齿面为对象进行仿真计算和试验验证,仿真计算的结果和试验结果非常吻合,验证所提出的方法的正确性。In measurement of the form error of complicated precise surface of machine parts by laser interferometry, it is necessary for the optical system of interferometer to design and analysis of error with simulation method. In this report, based on the optical system used in our research, the general ray tracing method in a homogeneous medium between two arbitrary surfaces considering the setting error of the optical elements, and between an arbitrary 3D surface and a common surface, such as plane, spherical, and cylindrical surfaces, and the ray tracing method in optical system composed of some homogeneous medium segments is proposed and the calculation method for the image of measured surfaces is discussed. The simulation and the measurement experiment are carried out respectively by taking planar test piece and gear flank as objects, and the two results match well, so the validity of proposed methods is proved and the usefulness of the method is verified.

关 键 词：光线追迹 图像仿真 激光干涉 干涉条纹 光程差 位相差 

分 类 号：TN247[电子电信—物理电子学]