氧化铍金刚石膜及其导热性能  

Diamond thin film/berillia and its thermal conductivity

作　　者：方梅[1,2] 余志明[1,2] 肖柱[1,2] 陈爽[1,2] 陈永勤[1,2] 

机构地区：[1]中南大学材料科学与工程学院,长沙410083 [2]教育部重点实验室功能薄膜材料研究室,长沙410083

出　　处：《粉末冶金材料科学与工程》2009年第1期32-35,共4页Materials Science and Engineering of Powder Metallurgy

基　　金：粉末冶金国家重点实验室开放基金

摘　　要：提高氧化铍的热导率,既能助其开拓新的发展空间,又能满足电子器件的散热需求,因而利用热丝化学气相沉积法在氧化铍上沉积得到与基体串、并联方式不同的、利于提高导热率的各种金刚石薄膜。通过扫描电镜和原子力显微镜观察薄膜表面的晶体形貌;采用X射线衍射仪分析薄膜成分;借助热物性激光测试仪测量金刚石膜/氧化铍基复合体的热扩散系数,并计算其热导率。结果表明:镀膜后可使氧化铍的热导率提高12.1%～34.4%;基体预处理方法、金刚石膜和氧化铍基体的串、并联方式对复合体的热导率均有较大影响。In order to improve the thermal conductivity ofberillia substrates, diamond films were deposited on its surface by means of hot-filament chemical vapor deposition（HFCVD）. The surface structures and morphologies were investigated by scanning electron microscopy（SEM） and atomic force microscopy（AFM）, while the components and the thermal conductivities were detected by X-ray diffraction（XRD） and laser-diathermometer respectively. The results show that diamond films have improved the conductivites of berillia by 12.1%-34.4% resulting from different BeO pre-treatments and the combination modes of diamond/BeO.

关 键 词：热丝化学气相沉积 金刚石薄膜 氧化铍 热导率 

分 类 号：TQ304[化学工程] TQ164