甲烷流量对高掺硼金刚石多晶薄膜形态生长的影响  

Influence of methane flow on boron-doped polycrystalline diamond films

作　　者：屈芳[1,2] 白亦真[1,2] 庄春强[2,3] 贾福超[1,2] 邢娇杨[1] 姜辛[3] 

机构地区：[1]大连理工大学物理与光电工程学院,辽宁大连116024 [2]大连理工大学三束材料表面改性实验室,辽宁大连116024 [3]大连理工大学材料科学与工程学院,辽宁大连116024

出　　处：《材料研究与应用》2009年第1期28-31,共4页Materials Research and Application

摘　　要：在不同的甲烷流量下,用热丝化学气相沉积方法(HFCVD)在N型(100)单晶硅片上制备了掺硼金刚石薄膜.用扫描电子显微镜(SEM)和拉曼光谱(Raman)对薄膜检测的结果表明,随着甲烷流量的增加,掺硼金刚石薄膜的二次形核增加,晶粒尺寸减小,晶界变得模糊,结晶性下降,非金刚石相增多,过高的甲烷流量导致掺硼金刚石薄膜的球状生长.Boron-doped diamond films were prepared using hot filament chemical vapor deposition （HF- CVD） on silicon （100） substrate with different methane flow. The influence of methane flow on borondoped polycrystalline diamond films was investigated by SEM and Raman spectra. It was found that the secondary nucleation of boron-doped polycrystalline diamond films increases with the increasing of methane flow,white the crystallinity presents opposite tendency.

关 键 词：掺硼金刚石 热丝CVD 扫描电子显微镜 拉曼光谱 

分 类 号：O484.4[理学—固体物理]