微波单片陶瓷电路技术研究  

Microwave Monolithic Ceramic Circuit(MMCC) Technology

作　　者：毛小红[1] 高能武[1] 项博[1] 秦跃利[1] 

机构地区：[1]中国电子科技集团公司第二十九研究所,四川成都610036

出　　处：《电子工艺技术》2009年第2期86-88,共3页Electronics Process Technology

摘　　要：微波单片陶瓷电路(MMCC)是一项新兴的薄膜集成技术,是将构成微波电路的要素尽可能采用薄膜电路的实现方式集成于陶瓷基片上,并采用微细实心金属孔及空气桥、介质跨接等工艺实现接地、跨接和互联,可大大提高集成度,改善微波产品的性能。对该项技术进行了简要的介绍,并对主要的工艺技术如微小实心孔及金属化、集成电容技术、介质桥技术进行了重点阐述,同时应用MMCC技术设计和制作了微波鉴相电路,达到了预期效果。As a kind of thin film integrated technology, MMCC （microwave monolithic ceramic circuit ） integrates nearly all the elements of microwave integrated circuits on a ceramic substrate by thin film technologies. It adopts such technologies like tiny metal hole to ground, air bridge to connect each other. MMCC technologies can increase integration level of thin film circuit and improve the performance of microwave products. The brief introduction is presented. Especially explain the main technology such as tiny metal hole technology, integrated capacity technology and air bridge technology. A kind of microwave divider circuit has been designed and produced by using MMCC technology. The expected performance has been achieved.

关 键 词：微波 单片 陶瓷电路 薄膜 

分 类 号：TN454[电子电信—微电子学与固体电子学]