生瓷带打孔机运动平台的设计  

Movement Platform Design of Green Ceramic Tape Punching Machine

作　　者：王贵平[1] 董永谦[1] 田芳[1] 狄希远[1] 

机构地区：[1]中国电子科技集团公司第二研究所,山西太原030024

出　　处：《电子工艺技术》2009年第2期113-115,共3页Electronics Process Technology

摘　　要：LTCC是现代微电子封装中的的重要组成部分,因其性能优良而广泛用于高速、高频系统中,生瓷带打孔机是LTCC多层基板制备中的关键设备。高速精密的运动控制技术和精密机械加工技术是生瓷带打孔机的关键技术。本文主要介绍了生瓷带打孔机中X、Y运动平台的设计理念、计算方法、分析和部分仿真结果。对于其它设备的研制,具有一定的借鉴引用价值。LTCC is the important part of the modern micro - electronics packaging application. It has good performance and is abroad used in high speed and high frequency systems. Green ceramic tape punching machine is a main equipment for multi - layer board manufacturing of LTCC. High speed and precision movement control technics and exact machining technics are important to punching machine. Introduce the design principle, calculating method, analysis and emulation result of X, Y movement platform. The main method is discussed and is available for reference.

关 键 词：LTCC 生瓷带 打孔 X、Y运动平台 

分 类 号：TN605[电子电信—电路与系统]