复合型场发射阵列失效性研究  

Research on Failure of Compounded Field Emitter Arrays

作　　者：李东方[1] 林祖伦[1] 陈文彬[1] 代令[1] 何世东[1] 曹伟[1] 

机构地区：[1]中国电子科技大学光电信息学院,成都610054

出　　处：《电子器件》2009年第1期4-7,共4页Chinese Journal of Electron Devices

摘　　要：复合型尖锥场发射阵列制备工艺过程中遇到的问题主要有栅极的脱落、阴极的氧化、尖锥微毛刺现象。为了提高器件的整体性能,试验采用了三种工艺改进方法,在真空环境中600℃高温退火;在氢气中进行氢化处理;对器件进行15 h的老炼。改进工艺后开启电压由75 V降到60 V,阳极收集最大电流从150μA提高到300μA,充分说明了改进工艺的可行性。The problems encountered mostly in fabrication technologies of compounded field emitter arrays（FEAs） are the grid＇s abscission,the oxidation of cathode,and the micro-burrs on the tip surface.To enhance the whole performances of devices,three improved technologies are introduced in the experiments,including annealing at 600℃ in the vacuum environment,the hydrogenation treatment at the hydrogen atmosphere,and the aging process for 15 hours.Finally,the turn-on voltage descends form 75 V to 60 V,and the maximum current collected by anode increases from 150 μA to 300 μA,which both prove the feasibility of the improvement technologies.

关 键 词：场发射阵列 退火 老炼 氢化处理 

分 类 号：O462.4[理学—电子物理学]