具有斜拉梁的串联接触式射频微机电系统开关  

DC-contact series radio-frequency micro electromechanical system switch with slanting beams

作　　者：侯智昊[1] 刘泽文[1] 胡光伟[1] 刘理天[1] 李志坚[1] 

机构地区：[1]清华大学微电子学研究所,北京100084

出　　处：《清华大学学报（自然科学版）》2009年第2期309-312,共4页Journal of Tsinghua University(Science and Technology)

基　　金：北京市科委项目(GYYKW05070014);国家创新基金支持项目(06c26213100944)

摘　　要：为解决悬臂梁结构的射频微机电系统开关在残余应力的作用下会发生翘曲的问题,提出在悬臂梁的顶端引入斜拉梁的方法。使用Al/Au复合桥膜作为射频微机电系统开关的上电极,实现了Au-Au接触,利用BorofloatTM玻璃作为衬底,使用电阻对导通状态下的射频信号与驱动电极旁路进行隔离,使它的射频性能不受驱动电压的影响。测试表明:隔离度在12 GHz的频率下,插入损耗和隔离度分别为-0.29 dB和-20 dB。该射频微机电系统开关适合于DC-X波段的应用。A DC-contact series radio frequency （RF） micro electromechanical system （MEMS） switch with slanting beams was developed to eliminate warping of the cantilever beam due to residue stresses. An Al/Au membrane was used as the upper electrode to provide direct Au-Au contact. The radio frequency MEMS switch was fabricated on a BorofloatTM glass substrate with the natural electrical resistance used to isolate the radio-frequency signal and the bias voltage which gives the MEMS switch a low insertion loss. Tests show that the insertion loss is -- 0.29 dB and the isolation is -- 20 dB at 12 GHz respectively. Thus this switch is suitable for applications having frequencies from DC to the X band.

关 键 词：射频微机电系统开关 串联接触 斜拉梁 残余应力 

分 类 号：TN303[电子电信—物理电子学]