大面积PECVD平行板电极间电势差分布均匀性数值研究  

Numerical study on uniformity of potential difference distribution of parallel-plate electrodes in large-area PECVD reactor

作　　者：葛洪[1] 张晓丹[1] 赵静 赵颖[1] 

机构地区：[1]南开大学光电子薄膜器件与技术研究所,南开大学光电子薄膜器件与技术天津市重点实验室,光电信息技术科学教育部重点实验室(南开大学,天津大学),天津300071 [2]天津新华职工大学,天津300040

出　　处：《真空》2009年第2期11-14,共4页Vacuum

基　　金：国家重点基础研究发展计划项目(批准号:2006CB202602和2006CB202603);国家自然科学基金(批准号:60506003);南开大学博士启动基金(批准号:J02031);科技部国际合作重点项目(批准号:2006DFA62390);国家高技术研究发展计划(批准号:2007AA05Z436);教育部新世纪人才计划(批准号:60506003NCET)资助的课题

摘　　要：应用二维准平面电路模型对等离子体增强化学气相沉积(PECVD)大面积平行板电极间电势差分布均匀性进行了数值研究。计算结果表明:在等离子体存在的条件下,电极间电势差分布非均匀性与真空下相比大大增加,电极间的电势驻波效应显著增强,在甚高频条件下会有一阶电势驻波节点出现。另外,波长衰减因子对电势差分布非均匀性影响也表明电极间的电势驻波效应在很大程度上是受等离子体辉光条件控制。本文数值计算结果与近来实验报道的相关结果有很好的吻合。A 2-D quasi-planar circuit model was used to study numerically the uniformity of potential difference distribution between large-area parallel-plate electrodes of PECVD reactor. The results showed that the non-uniformity of the distribution increases greatly in plasma in comporison with that in vacuum, and the effect of potential standing wave between electrodes is enhanced obviously even the linear standing wave node will occur at very high frequency. In addition, the effect of potential standing wave can be controlled by the conditions under which the plasma discharge is available to a great extent, since the non-uniformity of potential difference distribution is affected by the wavelength attenuation factor. The results of numerical evaluation are in good agreement with experimental results as shown in other recent reports.

关 键 词：等离子体增强化学气相沉积 电势驻波效应 波长衰减因子 

分 类 号：O451[理学—无线电物理] O53[理学—物理]