扩散硅谐振式压力传感器同频干扰的建模与消除  

Model and Elimination for Co-Channel Interference in Diffused Silicon Resonant Pressure Sensor

作　　者：赵晋敏[1,2] 李守荣[1] 王军波[2] 陈德勇[2] 刘磊[2] 史晓晶[2] 

机构地区：[1]华北电力大学电气与电子工程学院,北京102206 [2]中国科学院电子学研究所传感技术国家重点实验室,北京100190

出　　处：《传感技术学报》2009年第3期362-365,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目资助(60674112、60772018);国家863计划项目资助(2007AA4Z318)

摘　　要：为简化谐振式微机械压力传感器的制备工艺,提出了一种采用扩散硅作为谐振梁的压力传感器,并采用电磁激励实现传感器的闭环控制。实验中发现:由于采用扩散硅材料,传感器受到较为严重的同频干扰影响,因此,消除传感器的同频干扰成为需要解决的一个主要问题。通过对采用扩散硅作为谐振梁的压力传感器微结构进行分析,建立了传感器主要噪声来源同频干扰的等效电路模型,据此提出一种新的不对称双端激励解决方法。实验结果表明,该方法可有效地降低传感器的同频干扰,传感器的信噪比由1.53提高至35,为传感器闭环激励和检测提供了有效的手段。The processes to accomplish the resonant micro-machined pressure sensor are more difficult and complex so that the sensor was applied to limited fields. To simplify the processes for this kind of pressure sensor, a novel microstructure pressure sensor with the diffused silicon as the resonant beam was proposed and the electromagnetic excitation was applied to realize the close-looped control for the sensor. It is founded that the sensor was affected by the high co-channel interference during the close-looped control testing. So how to eliminate the co-channel interference is the main problem for the sensor. Therefore, the microstructure of the micro-machined pressure sensor was analyzed at first, and then the equivalent circuit model of the main noise source co-channel interference was brought up, finally a novel measure with nonsymmetrical excitation was proposed. Experiments show that this measure can eliminate the co-channel interference of the sensor and the S/N ratio is improved from 1.53 to 35, which provide the effective ways to close-looped excitation and detection for the sensor.

关 键 词：扩散硅 谐振式微机械压力传感器 同频干扰 非对称激励 电磁激励和检测 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]